雙軸精密劃片機(jī)

2023/02/20 分類:半導(dǎo)體設(shè)備案例中心 1037 0

雙軸晶圓切割機(jī)為12英寸全自動(dòng)動(dòng)精密劃片機(jī)，

采用高精密進(jìn)口主要配件，T軸采用DD馬達(dá)，重復(fù)精度1μm，穩(wěn)定性極強(qiáng)

采用進(jìn)口研磨級(jí)超高精密滾珠絲+松下伺服電機(jī)A6系列，精度高，耐用性久，穩(wěn)定性高，超高直線度，實(shí)測(cè)0.9um采用進(jìn)口研磨級(jí)超高精密滾珠絲杠，定位精度可達(dá)2μm

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雙軸精密劃片機(jī)
雙軸晶圓切割機(jī)為12英寸全自動(dòng)動(dòng)精密劃片機(jī)，采用高精密進(jìn)口主要配件，T軸采用DD馬達(dá)，重復(fù)精度1μm，穩(wěn)定性極強(qiáng) 采用進(jìn)口研磨級(jí)超高精密滾珠絲+松下伺服...

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標(biāo)簽:伺服電機(jī)伺服驅(qū)動(dòng)器松下

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